Raw material hydrogen: catalytic reforming (coal, natural gas, methanol, ethanol, dimethyl ether, gasoline, etc.); chemical decomposition of compounds, hydrides, formic acid, etc.; water electrolysis (alkaline solution, pure water); biological hydrogen production; various by-product hydrogen (ammonia, aluminum, boron hydride) (chlor-alkali, refining, petrochemical, coking, coal chemical, etc.). It can be widely used in hydrogen energy, semiconductor chips, protective gas for sintering furnaces, MOCVD, synthetic diamonds (MPCVD), chromatography analysis, metallurgy, as well as hydrogen/helium separation, and hydrogen isotope (protium, deuterium, tritium) separation and purification.  

H2 output: 1 – 10 m³/h;

H2 purity: 99.99 – 99.9999%;

Main applications:

Gas chromatography  

Fuel cell  

Nuclear power  

Polysilicon  

Electronics  

Metallurgy  

Available sources of raw material hydrogen include: reforming hydrogen (coal, natural gas, gasoline, diesel, naphtha, methanol, ethanol, dimethyl ether, ether, etc.); various by-product hydrogen (chlor-alkali, refining, petrochemical, coking, coal chemical, etc.); chemical decomposition hydrogen (ammonia, aluminum, boron hydride, hydrides, formic acid, etc.); electrolysis (alkaline solution, pure water) hydrogen, etc.  

It can be widely used in hydrogen energy, semiconductor chips, protective gas for sintering furnaces, MOCVD, synthetic diamonds, chromatography analysis, etc., as well as hydrogen/helium separation and hydrogen isotope (protium, deuterium, tritium) separation and purification.  

Hydrogen purifier for semiconductor chips and LCD-CVD  

■ The CVD manufacturing process of semiconductor chips requires hydrogen purity of 8N~12N, which can only be achieved through palladium membrane purification. Our products break the foreign monopoly and can also provide key electronic gases for the CVD process of TFT-LCD liquid crystal displays.  

Hydrogen purifier for synthetic diamonds  

■ Used for MPCVD processes, significantly improving the quality and color of synthetic diamonds (especially those used in jewelry).